Wafer Container Monitoring Concerning Airborne Molecular Contaminations along a 300 mm Power Semiconductor Production Flow
نویسندگان
چکیده
The focus of the study was to understand behavior airborne molecular contaminations (AMC) within 300 mm wafer containers called front-opening unified pods (FOUPs) in a high-volume fabrication facility for power semiconductors Infineon Technologies Dresden. A main goal implement new concepts and strategies prevent different from any yield losses driven by AMC. It could be shown, that there is strong dependency concentration type determined on investigated process steps.
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ژورنال
عنوان ژورنال: Solid State Phenomena
سال: 2021
ISSN: ['1662-9787', '2813-0936', '1662-9779', '1012-0394']
DOI: https://doi.org/10.4028/www.scientific.net/ssp.314.41